Titanium Sputtering Target
Titanium is a common material found in many products, including watches, drill bits, laptops, and bicycles, just to name a few. In pure form, it is lustrous and silvery-white in appearance. It has a melting point of 1,660°C, a density of 4.5 g/cc, and vapor pressure of 10-4 Torr at 1,453°C. It is a durable material that is easily fabricated when the heat is applied. Its strong, lightweight characteristics and excellent corrosion resistance make it ideal for ocean liner hulls, aircraft engines, and designer jewelry. Titanium is biocompatible so that it can be found in surgical tools and implants. Titanium is generally evaporated in a vacuum for the purposes of wear and decorative, semiconductor, and optical coatings.
Titanium Sputtering Target Properties
| Material Type | Titanium | Theoretical Density (g/cc) | 4.5 |
|---|---|---|---|
| Symbol | Ti | Z Ratio | 0.628 |
| Atomic Weight | 47.867 | Sputter | DC |
| Atomic Number | 22 | Max Power Density* | 50 |
| Color/Appearance | Silvery Metallic | (Watts/Square Inch) | |
| Thermal Conductivity | 21.9 W/m.K | Type of Bond | Indium, Elastomer |
| Melting Point (°C) | 1,660 | Comments | Alloys with W/Ta/Mo; evolves gas on first heating. |
| Coefficient of Thermal Expansion | 8.6 x 10-6/K |
Titanium Sputtering Target Specifications
| Product Name | Titanium Sputtering Target | |
|---|---|---|
| CAS | 7440-32-6 | Confirm |
| Diameter | 50 mm ± 1mm | Confirm |
| Thickness | 3 mm ± 0.5mm | Confirm |
| Purity | >99.99% | Confirm |
| Density | 4.056 g/cm³ | Confirm |
| Molecular Weight | 47.867 g/mol | Confirm |
| Melting Point | 1668 °C | Confirm |
| Shape | Round | Confirm |
| Size and Shape | Targets diameter and thickness can be customized according to customers’requirements | |
| Backing Plate | Copper (as per customer requirement) | |
| Conclusion | The specifications conform with enterprise standard | |
| Main Inspect Verifier | Manager QC | |
